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Low-coherence snapshot phase-shifting diffraction phase microscope
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DOI：10.1016/j.optlaseng.2023.107618.png)
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摘要
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We proposed a Wollaston-prism-based snapshot phase-shifting diffraction phase microscope (WP-SPDPM) for low-coherence snapshot quantitative phase imaging and videography. Wollaston prism separates two orthogo-nally linearly polarized beams with high degrees of polarization at a sufficiently small separation angle; one of the beams passing through a pinhole serves as the reference beam. Four phase-shifted interferograms are simultane-ously acquired with a polarization camera to accurately retrieve a high spatial resolution phase map. The system is nearly common-path in configuration and can achieve a large slope range and high accuracy. In addition to the ability to resist environmental noise, the WP-SPDPM is suitable for phase measurement using low-coherence light. The accuracy and large measurable slope range of the proposed system is validated and compared experi-mentally with a commercial profilometer. We believe WP-SPDPM is a powerful tool for the accurate and robust quantitative phase measurement and has a significant potential of the real-time phase imaging.
Keyword:
Optical metrology
Quantitative phase imaging
Surface measurement
Optical testing
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