.png){kind=icon}
返回
Low cost dislocation sensor with differential capacitor
.png){kind=icon}
PRE
AI
DOI：10.1016/j.sna.2007.06.023.png)
.png){kind=icon}
原文求助.png){kind=icon}
分享.png){kind=icon}
收藏
摘要
En 中文
A designed and constructed low cost dislocation sensor based on differential capacitor is described in this paper. Measurement methodology of several metrological properties of dislocation sensor was applied successfully and the results of these measurements are presented. Measurements were conducted in dislocation range of 3-6000 nm. Linearity of detector in the mentioned range was confirmed. Detector's sensitivity was estimated at the level of 1 nm. After digital compensation of temperature, reading stability was marked at the level of +/- 2 nm. The results of these measurements were included. (c) 2007 Elsevier B.V. All rights reserved.
Keyword:
dislocation sensor
differential capacitor
bow dynamometer
AI总结
对已上传原文的论文进行重点信息的提取，主要内容包括：简要概述、研究摘要、背景介绍、关键亮点、图文解析、展望与总结。
期刊
IF:
4.9
论文数:
1.5W
被引数:
3.3W
机构
暂无机构信息
引用论文
.png){kind=icon}
High-sensitivity silicon capacitive sensors for measuring medium-vacuum gas pressures用于测量中真空气体压力的高灵敏度硅电容传感器
PREAI
分享收藏
分享收藏 没有更多内容
没有更多内容