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Magnetostrictive type inductive sensing pressure sensor
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DOI：10.1016/j.sna.2015.11.023.png)
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摘要
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This study presents a magnetostrictive type inductive sensing pressure sensor which consisted of a planar coil, CoFeB magnetic films, and a Si diaphragm. As the Si diaphragm deformed by a pressure load, the inverse-magnetostriction effect would cause permeability changes of the CoFeB magnetic films. Thus, the permeability changes as well as the pressure load can be detected by the inductance change of a planar inductor. To demonstrate the feasibility of the proposed pressure sensor, the planar inductor designs of different coil turns and in-plane patterns of magnetic films are fabricated and tested. Preliminary measurements show that the pressure sensors with 6 and 12 coil turns have sensitivities of 0.079 %/kPa and 0.064 %/kPa, respectively. In addition, based on the in-plane pattern design of the magnetic films, the gauge factor could be tuned from 55 to 852. (C) 2015 Elsevier B.V. All rights reserved.
Keyword:
Pressure sensor
Inverse-magnetostriction effect
Inductive sensing
CoFeB
Gauge factor
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IF:
4.9
论文数:
1.5W
被引数:
3.3W
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