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Manufacturability-oriented early lithography hotspot detection via an attention-enhanced hybrid network
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AI
H
王
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C
G
Y
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DOI：10.1016/j.measurement.2026.122805.png)
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Abstract
En 中文
• Formulate hotspot screening as design-stage virtual metrology. • Define a dimensionless manufacturability-risk indicator and its metrological role. • Embed layout and lithography priors into a virtual metrology function. • Characterize prediction-level uncertainty via repeated-run confidence intervals. • Show favorable Recall-FA/FAR trade-offs on ICCAD-2012 and ICCAD-2019.
Keywords:
Lithography hotspot detection
Virtual metrology
Manufacturability assessment
Multi-scale feature fusion
Attention mechanism
Journal
IF:
5.6
Papers:
1.9W
Citations:
5.4W
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Cited Papers