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Manufacturing micro-hole array fiber urea concentration sensors using femtosecond laser
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DOI：10.1117/1.OE.65.4.046102.png)
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Abstract
En 中文
In this paper, a microporous array optical fiber sensor was designed and fabricated. Unlike conventional structures, the proposed design features four offset micro-holes, requiring fewer holes than similar configurations. This results in a more compact structure that is easier to fabricate while significantly improving sensitivity and maintaining fiber strength. Four key parameters-diameter, depth, offset, and spacing-were optimized, and sensing characteristics were evaluated using urea solutions. The micropores were fabricated via femtosecond laser ablation using a helical processing method with simultaneous feed motion, ensuring greater stability and processing quality. Simulation results indicated optimal parameter ranges of 5 to 7 mu m for diameter, 76 to 79 mu m for depth, 3 to 4 mu m for offset, and 9 to 12 mu m for the spacing L. The fabricated micropores exhibited an actual diameter of 6.77 mu m, a depth of 78.5 mu m, offsets ranging from 3.3 to 3.4 mu m, and a spacing of 11.2 mu m, all conforming to design specifications. Optimal processing parameters were identified as a rotational speed of 132.6 RPS and a feed rate of 0.001 mm/rev. An adaptive Savitzky-Golay filtering algorithm was introduced, employing adaptive window size and polynomial order selection to retain global trends while suppressing local fluctuations. After optimization, the sensor demonstrated a concentration sensitivity of 0.22199 nm/% (R2=0.9975) and a refractive index sensitivity of 137.39363 nm/RIU.
Keywords:
micro-hole
urea concentration
femtosecond laser
optical fiber sensors
Savitzky-Golay
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178
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