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Massively parallel femtosecond laser processing
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DOI：10.1364/OE.24.018513.png)
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摘要
En 中文
Massively parallel femtosecond laser processing with more than 1000 beams was demonstrated. Parallel beams were generated by a computer-generated hologram (CGH) displayed on a spatial light modulator (SLM). The key to this technique is to optimize the CGH in the laser processing system using a scheme called in-system optimization. It was analytically demonstrated that the number of beams is determined by the horizontal number of pixels in the SLM N-SLM that is imaged at the pupil plane of an objective lens and a distance parameter p(d) obtained by dividing the distance between adjacent beams by the diffraction-limited beam diameter. A performance limitation of parallel laser processing in our system was estimated at N-SLM of 250 and p(d) of 7.0. Based on these parameters, the maximum number of beams in a hexagonal close-packed structure was calculated to be 1189 by using an analytical equation. (C) 2016 Optical Society of America
Keyword:
SPATIAL LIGHT-MODULATOR
ROTATION-ANGLE METHOD
2-PHOTON POLYMERIZATION
FREQUENCY RESPONSE
COMPENSATION
FABRICATION
HOLOGRAM
SILICON
OPTIMIZATION
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IF:
3.3
论文数:
6.1W
被引数:
14.3W
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