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Materials processing with superposed Bessel beams
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DOI：10.1016/j.apsusc.2015.11.074.png)
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Abstract
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We report experimental results of femtosecond laser processing on the surface of glass and metal thin film using superposed Bessel beams. These beams are generated by a combination of a spatial light modulator (SLM) and an axicon with >50% efficiency, and they possess the long depth-of-focus (propagation-invariant) property as found in ordinary Bessel beams. Through micromachining experiments using femtosecond laser pulses, we show that multiple craters can be fabricated on glass with single-shot exposure, and the 1+(1) superposed beam can reduce collateral damage caused by the rings in zero-order Bessel beams in the scribing of metal thin film. (C) 2015 Elsevier B.V. All rights reserved.
Keywords:
Materials processing
Femtosecond laser
Spatial lightmodulator
Beam-shaping
Glass
Thin film solar cell
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