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MEMS-based AC voltage reference

delete2005-04-01
delete16
PRE
AI
A
Ari Kärkkäinen
N
Nadine Pesonen
M
Mika Suhonen
A
A. Oja
A
A. J. Manninen
N
N.I. Tisnek
H
Heikki Seppä
DOI:10.1109/TIM.2004.843422delete
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摘要

摘要

En 中文
An ac root-mean-square (RMS) voltage reference based on a microelectromechanical system (MEMS) component is presented. The device stability is investigated in various experiments. A time stability at a level of a few mu V/V in 24 h was measured using an accelerometer MEMS component at an operating frequency of 100 kHz..
Keyword:
AC voltage reference
capacitive sensors
micro-electromechanical systems
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期刊

IEEE Transactions on Instrumentation and Measurement 封面图
IEEE Transactions on Instrumentation and Measurement
IF:
5.9
论文数:
2.0W
被引数:
5.8W

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