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MEMS-based AC voltage reference
DOI:10.1109/TIM.2004.843422.png)
摘要
En 中文
An ac root-mean-square (RMS) voltage reference based on a microelectromechanical system (MEMS) component is presented. The device stability is investigated in various experiments. A time stability at a level of a few mu V/V in 24 h was measured using an accelerometer MEMS component at an operating frequency of 100 kHz..
Keyword:
AC voltage reference
capacitive sensors
micro-electromechanical systems
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期刊
IF:
5.9
论文数:
2.0W
被引数:
5.8W
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