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Micro-Hall devices: performance, technologies and applications

delete2003-09-01
delete132
PRE
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G
Giovanni Boero
M
Michel Demierre
P
P.-A. Besse
R
R.S. Popović
DOI:10.1016/S0924-4247(03)00192-4delete
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摘要

摘要

En 中文
In this review paper, we summarize the performance (in particular the magnetic field resolution), micro-fabrication technologies and applications of micrometer sized Hall effect devices. Additionally, our activities in this domain are briefly described. (C) 2003 Elsevier B.V. All rights reserved.
Keyword:
micro-Hall devices
scanning hall probe microscopy
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期刊

Sensors and Actuators A-Physical 封面图
Sensors and Actuators A-Physical
IF:
4.9
论文数:
1.5W
被引数:
3.3W

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