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Micro-machining

delete2012-08-28
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E
E. Brinksmeier *
W
W. Preuß
DOI:10.1098/rsta.2011.0056delete
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摘要

摘要

En 中文
Manipulating bulk material at the atomic level is considered to be the domain of physics, chemistry and nanotechnology. However, precision engineering, especially micro-machining, has become a powerful tool for controlling the surface properties and sub-surface integrity of the optical, electronic and mechanical functional parts in a regime where continuum mechanics is left behind and the quantum nature of matter comes into play. The surprising subtlety of micro-machining results from the extraordinary precision of tools, machines and controls expanding into the nanometre range-a hundred times more precise than the wavelength of light. In this paper, we will outline the development of precision engineering, highlight modern achievements of ultra-precision machining and discuss the necessity of a deeper physical understanding of micro-machining.
Keyword:
micro-machining
diamond machining
ultra-precision grinding
polishing
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期刊

P
Philosophical Transactions of the Royal Society A-Mathematical Physical and Engineering Sciences
IF:
3.7
论文数:
7.8K
被引数:
2.8W

机构

U
University of Bremen
学者数:
8.1K
论文数: 7.2K
被引数: 1.1W
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