.png){kind=icon}
返回
Micro-vibration stage using piezo actuators
.png){kind=icon}
PRE
AI
DOI：10.1016/j.sna.2013.01.025.png)
.png){kind=icon}
原文求助.png){kind=icon}
分享.png){kind=icon}
收藏
摘要
En 中文
In this paper, a novel micro-vibration stage composed of four piezo actuators and a flexure hinge is proposed and developed. Each piezo actuator is developed by a new type of stroke magnifying mechanism incorporated with a multi-stacked PZT (lead zirconate titanate) and it is capable of performing micro vibrating motion. The flexure hinge, used to connect the piezo actuators, is designed to reduce the mutual interference of the linear motion of piezo actuators between two orthogonal directions and realize the in-plane parallel kinematic 2D vibration. According to the experimental results, the micro-vibration stage can generate large vibration amplitude up to 100 mu m in two orthogonal directions independently at a frequency of 1100 Hz, and the vibration traces like line, circle and ellipse are acquired. (C) 2013 Elsevier B.V. All rights reserved.
Keyword:
Vibration stage
Piezo actuators
Stroke magnifying mechanism
Vibration trace
AI总结
对已上传原文的论文进行重点信息的提取，主要内容包括：简要概述、研究摘要、背景介绍、关键亮点、图文解析、展望与总结。
期刊
IF:
4.9
论文数:
1.5W
被引数:
3.3W
机构
引用论文
.png){kind=icon}
分享收藏Design and Control of a Three-Axis Serial-Kinematic High-Bandwidth Nanopositioner三轴串联运动学高带宽纳米定位器的设计与控制
PREAI
分享收藏
查看更多内容