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Microfabricated rubber microscope using soft solid immersion lenses
DOI:10.1063/1.2194477.png)
摘要
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We show here a technique of soft lithography to microfabricate efficient solid immersion lenses (SIL) out of rubber elastomers. The light collection efficiency of a lens system is described by its numerical aperture (NA), and is critical for applications as epifluorescence microscopy [B. Herman, Fluorescence Microscopy (BIOS Scientific, Oxford/Springer, United Kingdom, 1998). While most simple lens systems have numerical apertures less than 1, the lenses described here have NA=1.25. Better performance can be engineered though the use of compound designs; we used this principle to make compound solid immersion lenses (NA=1.32). An important application of these lenses will be as integrated optics for microfluidic devices. We incorporated them into a handheld rubber microscope for microfluidic flow cytometry and imaged single E. Coli cells by fluorescence. (c) 2006 American Institute of Physics.
Keyword:
LITHOGRAPHY
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3.6
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10.4W
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17.8W
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