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Micromachined glucose sensor
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AI
DOI：10.1016/0956-5663(96)83726-2.png)
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摘要
En 中文
Until now the enzyme membrane in micro-enzyme sensors has been deposited on the top of the transducer. In such sensors problems are often caused by membrane adhesion and the mechanical stability of the membrane. Furthermore, a place-selective deposition of the membrane material, which is a precondition for the development of multi-functional sensors, is difficult to achieve. To overcome these problems a new device was designed. The enzyme membrane is deposited into the chip in pyramidal containments produced on silicon by anisotropic etching. Here we demonstrate the development of glucose sensors in containment technology. Containments with opening sizes towards the analyte solution side of between 120 mu m and 480 mu m were used. The enzyme membrane (gelatine gel with glucose oxidase) was deposited inside the containment. The sensitivity increased with increasing opening size. When the sensor was immersed continuously in undiluted human serum, it responded to changes in the glucose concentration for more than 2 days.
Keyword:
anisotropic etching
containment sensor
glucose sensor
mass-production technology
miniaturization
silicon technology
