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Microscopic sensors using optical wireless integrated circuits
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DOI：10.1073/pnas.1919677117.png)
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Abstract
En 中文
We present a platform for parallel production of standalone, untethered electronic sensors that are truly microscopic, i.e., smaller than the resolution of the naked eye. This platform heterogeneously integrates silicon electronics and inorganic micro-light emitting diodes (LEDs) into a 100-mu m-scale package that is powered by and communicates with light. The devices are fabricated, packaged, and released in parallel using photolithographic techniques, resulting in similar to 10,000 individual sensors per square inch. To illustrate their use, we show proof-of-concept measurements recording voltage, temperature, pressure, and conductivity in a variety of environments.
Keywords:
sensor
microscopic
microfabrication
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