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Mode-localized accelerometer with ultrahigh sensitivity
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DOI：10.1007/s11432-020-3057-y.png)
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The mode localization phenomenon is an effective technique to enhance sensor sensitivity, and some low noise floor mode-localized sensors, including accelerometers, mass sensors, and electrometers, have been successfully realized. To further improve the performance of the mode-localized accelerometer, we report a microelectromechanical system mode-localized accelerometer based on 4-degree of freedom (DoF) weakly coupled resonators (WCRs) with a stress-relief structure eliminating the thermal stress generated during the silicon-on-glass fabrication process. Experimental results show that compared with the state-of-the-art 3-DoF mode-localized accelerometer (4.40 g(-1)), the amplitude ratio-based sensitivity of the proposed accelerometer (119.36 V center dot g(-1)) is improved by 2612%. Moreover, the noise floor is 0.64 mu g center dot Hz(-1/2) from 0.01 to 3 Hz under the closed-loop circumstance. To the authors' best knowledge, this is the lowest measured noise floor for mode-localized accelerometers.
Keyword:
mode localization
weakly coupled resonators
accelerometer
degree-of-freedom
microelectromechanical system
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7.6
论文数:
4.9K
被引数:
8.9K
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