.png){kind=icon}
返回
Modeling ion-solid interactions for imaging applications
.png){kind=icon}
PRE
AI
DOI：10.1557/mrs.2014.57.png)
.png){kind=icon}
原文求助.png){kind=icon}
分享.png){kind=icon}
收藏
摘要
En 中文
Ion beams are now widely used to thin, shape, or cut materials on the submicrometer scale. This is possible because ions can sputter (i.e., physically remove) material from the target. Ions can also be used to image materials because the incident beam generates ion-induced secondary electrons (iSE). In both cases, the nature of the target material and the choice of the ion employed and its initial energy will determine not only how quickly the beam can thin a specimen, but also the resolution and contrast of the iSE image that is generated. Clearly, there is a need to be able to predict parameters, such as the nature, information content, and spatial resolution of the iSE image. These and other related questions have been investigated using Monte Carlo simulations. We show how the parameters defining quantities, such as depth of penetration and the energy deposited by the incident beam, or the signal yield and resolution of the iSE image, can be predicted using this approach and how these results make it possible to interpret data and optimize operating conditions.
Keyword:
ion beam analysis
microstructure
morphology
AI总结
对已上传原文的论文进行重点信息的提取，主要内容包括：简要概述、研究摘要、背景介绍、关键亮点、图文解析、展望与总结。
期刊
IF:
4.9
论文数:
5.3K
被引数:
9.5K
机构
引用论文
Theorizing “race trouble”: On racism, racializing practice, and the question of affect理论化“种族麻烦”：关于种族主义、种族化实践以及情感的问题
OAAI
OAAI分享收藏Contrast mechanisms of secondary electron images in scanning electron and ion microscopy扫描电子显微镜和离子显微镜中二次电子图像的对比机制
PREAI
分享收藏MOCHIO: a novel Multi-Objective Coronavirus Herd Immunity Optimization algorithm for solving brushless direct current wheel motor design optimization problem.png)
Automatika
OAAI
AutomatikaIF0
OAAI分享收藏The inclusion and construction of the worthy citizen through lifelong learning: a focus on the OECD通过终身学习实现有价值的公民的融入与构建：聚焦经合组织
PREAI
分享收藏
查看更多内容