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Molecular patterning using two-dimensional polymer Langmuir-Blodgett films
DOI:10.1002/adma.19970090417.png)
摘要
En 中文
Research News: Langmuir-Blodgett (LB) films for high-resolution resists for the preparation of integrated circuits with higher densities are reviewed briefly A technique based on the polymerization of monomeric LB films and a newer one based on the two-dimensional cross-linking of a polymeric LB film are described. It is demonstrated that cross-linkable polymeric LB films have the ability to create high-resolution molecular patterning with nanometer (layer) thickness. Examples of patterns produced with such films are presented.
Keyword:
N-OCTADECYLACRYLAMIDE
MULTILAYERS
RESISTS
DERIVATIVES
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期刊
IF:
26.8
论文数:
3.4W
被引数:
46.0W
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