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Monolithic 3D integration with 2D materials
DOI:10.1038/s41928-024-01260-7.png)
摘要
En 中文
The monolithic 3D integration of 2D molybdenum disulfide memtransistors and graphene chemitransistors can be used to create near-sensor computing chips with high interconnect density and a vertical separation between tiers of less than 50 nm.
期刊
IF:
40.9
论文数:
1.7K
被引数:
2.1W
机构
引用论文
The future of two-dimensional semiconductors beyond Moore's law超越摩尔定律的二维半导体的未来
NATURE NANOTECHNOLOGY
IF34.9
Monolithic and heterogeneous three-dimensional integration of two-dimensional materials with high-density vias具有高密度通孔的二维材料的单片和异质三维集成
NATURE ELECTRONICS
IF40.9
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