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Multi-frequency MEMS acoustic emission sensor
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DOI：10.1016/j.sna.2023.114648.png)
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摘要
En 中文
In this paper, a multi-frequency MEMS acoustic emission (AE) sensor is designed, characterized, and tested. The sensor includes sixteen individual resonators tuned in the range of 100-700 kHz. The resonator frequencies are selected to form constructive interference when they are connected in parallel to increase the signal-to-noise ratio. Each resonator is comprised of a membrane that forms the mass and four beams that provide stiffness. The membrane size is kept the same for each resonator to have approximately the same sensitivity per frequency. The influence of spring elements on the resonant frequency and the sensitivity is numerically demonstrated. The sensor is manufactured using MEMSCAP PiezoMUMPs. The characterization experiments show a slight shift in the resonant frequency of individual resonators compared to the design values. The MEMS sensor is packaged using a custom-designed printed circuit board to improve the signal-to-noise ratio. The sensor performance is compared with a conventional AE sensor. The sensitivity and frequency bandwidth of the MEMS AE device is brought to a comparable level to bulky AE sensors.
Keyword:
MEMS
Acoustic emission
Multi-frequency
Array
PiezoMUMPs
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期刊
IF:
4.9
论文数:
1.5W
被引数:
3.3W
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