Multiscale 3D X-ray imaging

doi:10.1038/s41928-019-0320-4

2019-10-15

PRE

R. Joseph Kline *

DOI：10.1038/s41928-019-0320-4

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摘要

En 中文

A technique known as ptychographic X-ray laminography can image integrated circuits over large volumes and with a resolution of around 10 nm.

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期刊

Nature Electronics

IF:

40.9

论文数:

1.7K

被引数:

2.1W

机构

national institute of standards & technology (nist) - usa

学者数:

9.7K

论文数: 9.0K

被引数: 4

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