Nano step height measurement using an optical method

doi:10.1016/j.sna.2017.02.019

2017-04-01

PRE

DOI：10.1016/j.sna.2017.02.019

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摘要

En 中文

This paper presents two optical methods for measuring nano step height standards and discusses the deviations in the measurements in detail. A white light interference (WLI) microscope and spinning disk confocal (SDCF) microscope were used in the experiments. The effect of illumination intensity and the standard's surface reflectivity were studied and analyzed. The surface properties of the step height standard were ameliorated using secondary coating technology. The experimental results demonstrated that the secondary coating technology effectively improved the measurement accuracy of the SDCF microscope. The WLI microscope measured accurately both before and after a secondary coating was applied. (C) 2017 Elsevier B.V. All rights reserved.

Keyword:

Nano-step height measurement

White light interference microscope

Spinning disk confocal microscope

Secondary coating technology

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期刊

Sensors and Actuators A-Physical

IF:

4.9

论文数:

1.5W

被引数:

3.3W

机构

shanghai jiao tong university

学者数:

15.7W

论文数: 11.7W

被引数: 159

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