.png){kind=icon}
.png){kind=icon}
Return
Novel infrared thermal radiation detector based on silica aerogel insulating film
.png){kind=icon}
PRE
AI
C
Y
Z
Z
DOI：10.1088/1361-665X/ae6378.png)
.png){kind=icon}
Original request for help.png){kind=icon}
Share.png){kind=icon}
Save
Abstract
En 中文
This study aims to explore simple preparation methods for high-quality SiO2 aerogel film and their potential applications in infrared thermal radiation detectors. By utilizing a layer of nanoscale gold particles (Au NPs) to release the film stress during the spin-coating and drying process, we obtained SiO2 aerogel film with uniform porosity, high adhesion strength, smooth surface, and excellent thermal insulation effect, with a measured thermal conductivity of 0.018 W mK(-1). Further, we applied the SiO2 aerogel film as a thermal barrier layer in microbolometer, experimentally obtaining a temperature coefficient (TCR) of -2.38%/K, a maximum voltage responsivity of 2.2 & times; 10(4) V W-1, a thermal response time of 0.17 ms, and a detectivity of 3.6 & times; 10(7) cm Hz(1/2) W-1. Notably, the device was manufactured using a CMOS-compatible process technology, which not only ensured low thermal conductivity but also enhanced device stability, simplified the fabrication process, reduced manufacturing costs, and improved yield, making it particularly suitable for large-scale batch array preparation.
Keywords:
SiO2 aerogel film
AuNPs
microbolometer
Journal
IF:
3.8
Papers:
8.5K
Citations:
2.5W
Organization
Cited Papers