.png){kind=icon}
返回
On-chip planar hydrogen sensor with sub-micrometer spatial resolution
.png){kind=icon}
PRE
AI
DOI：10.1016/j.snb.2015.06.113.png)
.png){kind=icon}
原文求助.png){kind=icon}
分享.png){kind=icon}
收藏
摘要
En 中文
We present an on-chip thin film device with a planar geometry suited for electronic detection of atmospheric hydrogen with a spatial resolution well below 1 pm. A titanium stripe of a few nanometers thickness is defined on an insulating substrate and separated into two metallically disconnected electrodes by oxidizing it locally to titanium dioxide with the tip of an atomic force microscope. The titanium dioxide line forms the active area. It is sensitized by a platinum sputtering step such that the two Ti electrodes remain disconnected. It is shown that electroformation processes can interfere with the sensing response above a threshold bias voltage, and the influences of oxygen gas as well as water vapor on the sensing are discussed. (C) 2015 Elsevier B.V. All rights reserved.
Keyword:
Hydrogen
Sensor
High spatial resolution
Electroformation
AI总结
对已上传原文的论文进行重点信息的提取，主要内容包括：简要概述、研究摘要、背景介绍、关键亮点、图文解析、展望与总结。
期刊
IF:
7.7
论文数:
3.4W
被引数:
12.6W
机构
引用论文
分享收藏Mesoporous nanoparticle TiO2 thin films for conductometric gas sensing on microhotplate platforms用于微热板平台上的电导气体传感的介孔纳米颗粒TiO2薄膜
PREAI
分享收藏Properties of hydrogen and hydrogen-vacancy complexes in the rutile phase of titanium dioxide.png)
PHYSICAL REVIEW B
PHYSICAL REVIEW BIF3.7
PREAI
分享收藏
分享收藏分享收藏
查看更多内容