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Optimized design and process for making a DC voltage reference based on MEMS
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DOI：10.1109/TIM.2004.843097.png)
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摘要
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A micromechanical moving plate capacitor has been designed and fabricated for use as a dc voltage reference. The reference is based on the characteristic pull-in property of a capacitive microelectromechanical system (MEMS) component. The design is optimized for stability. A new silicon-on-insulator (SOI) process has been developed to manufacture the component. We also report on improved feedback electronics and the latest measurement results.
Keyword:
capacitive sensors
feedback electronics
microelectromechanical systems (MEMS)
micromachining
silicon-on-insulator (SOI)
期刊
IF:
5.9
论文数:
2.0W
被引数:
5.8W
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