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Phase-engineered Y2O3 coatings enabling self-protective fluorinated surfaces for ultralow plasma erosion
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DOI：10.1016/j.surfcoat.2026.133708.png)
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Abstract
En 中文
• Y2O3 coatings were prepared by magnetron sputtering, with density and phase transition optimized via oxygen flux and 700 °C annealing. • The 9 μm thick films achieved a low etching rate of 6-8 nm/h and high hardness of 12.06 GPa, ensuring structural integrity after 10 h. • A vacancy-filling mechanism was revealed, where F-ions occupy intrinsic oxygen vacancies to drive in-situ crystalline Y2O3 formation. • The YF6 octahedral coordination network acts as a robust thermodynamic barrier, effectively shielding the bulk from plasma erosion.
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