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Phase-stepping interferometry: Five-frame algorithm with an arbitrary step
DOI:10.1016/S0143-8166(96)00048-6.png)
摘要
En 中文
The present paper offers a new formula for calculating the phase in interferometric measurements by the phase-stepping method. The proposed five-frame algorithm utilizes equal phase steps with an arbitrary value. Results are presented on computer simulation of the errors occuring at a phase-step different from 90 degrees and due to vibrations in the system 'interferometer-object'. (C) 1997 Elsevier Science Ltd.
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