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Planar diffuser/nozzle micropumps with extremely thin polyimide diaphragms
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DOI：10.1016/j.sna.2011.02.009.png)
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Valveless diffuser/nozzle micropumps with extremely thin polyimide (PI) diaphragms having thicknesses of 2.0 mu m and 5.4 mu m were fabricated. The micropump chamber had a depth of 530 mu m and diameter of 7 mm. The micropumps were operated by deflecting the diaphragms with alternating air pressure. The degree of deflection of the 2.0 mu m-thick membranes was large, i.e., approximately 220 mu m under static air pressure of 10 kPa. The flow rate of water in the micropump with a 2.0-mu m-thick diaphragm was 260 mu l/min with the air pressure alternating between 0 and 10 kPa at a frequency of 3 Hz, where the flow rate in the micropump with a 5.4-mu m-thick diaphragm was 310 mu l/mm. These water flow rates are relatively large, which is attributed to the large deflection amplitude of the PI films. The mechanical characteristics of the PI films used as micropump membranes are also discussed. (C) 2011 Elsevier B.V. All rights reserved.
Keyword:
MEMS
Micropump
Diffuser/nozzle micropump
Polyimide
Diaphragm
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4.9
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3.3W
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