Plasma source development for technical applications at IRS

Monika Auweter‐Kurtz

doi:10.1016/j.vacuum.2003.12.077

2004-04-01

PRE

Monika Auweter‐Kurtz *

Georg Herdrich

Stefan Laure

Henri Wagner

DOI：10.1016/j.vacuum.2003.12.077

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摘要

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At the Institute of Space Systems of the Universitat Stuttgart different plasma sources have been developed for a variety of technical applications. Short-pulsed magnetoplasmadynamic generators, thermal arc devices, inductively heated sources and hybrid generators are in operation. In this paper an overview on the sources and their field of application is given. (C) 2003 Elsevier Ltd. All rights reserved.

Keyword:

plasma sources

magnetoplasmadynamic generator

inductively heated plasma source

thermal arc device

hybrid plasma generator