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Precision surface metrology using a rapid optimization method in diffraction phase microscopy

delete2025-10-01
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PRE
AI
S
S. Narayan
G
Gannavarpu, Rajshekhar *
DOI:10.1364/AO.569841delete
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摘要

摘要

En 中文
对于测试样本表面轮廓的纳米级测量,光学干涉测量已成为精密计量学中一种突出的方法。该方法的基本要求是从记录的干涉图中可靠地测量相位。然而,相位恢复受到噪声、非均匀振幅波动和高计算成本等挑战的限制。本文提出了一种基于图形处理单元辅助的二阶优化技术,用于解调被严重噪声和条纹振幅不均匀变化破坏的干涉图。通过涉及不同噪声水平和不同条纹振幅波动的严格数值实验,证明了所提出方法在相位估计方面的有效性。结果表明,在处理被严重噪声破坏的干涉图时,所提出的方法提供了显著优势,包括高计算增益和稳健的相位估计精度。此外,通过应用衍射相位显微镜捕获的实验干涉图进行表面轮廓测量,展示了该方法的应用价值。(c) 2025 Optica Publishing Group. All rights, including for text and data mining (TDM), Artificial Intelligence (AI) training, and similar technologies, are reserved.
Keyword:
FRINGE-PATTERN-ANALYSIS
OPTICAL MEASUREMENT
FOURIER-TRANSFORM
EXPERIMENTAL MECHANICS
DIGITAL HOLOGRAPHY
PROFILOMETRY
DEMODULATION
TOPOGRAPHY
PRINCIPLES
TRENDS

期刊

A
Applied Optics
IF:
1.7
论文数:
1.0K
被引数:
5.1W

机构

I
indian institute of technology system (iit system)
学者数:
9.5W
论文数: 9.9W
被引数: 93
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