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Progress in Chip-Scale Photonic Sensing
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DOI：10.1109/TBCAS.2009.2020693.png)
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Chip-scale integrated planar photonic sensing systems for portable diagnostics and monitoring are emerging, as photonic components are integrated into systems with silicon (Si), Si complementary metal-oxide semiconductor, and fluidics. This paper reviews progress in these areas. Medical and environmental applications, candidate photonic sensors, integration methodologies, integrated subsystem demonstrations, and challenges facing this emerging field are discussed in this paper.
Keyword:
Chip-scale sensing
chip-scale systems
heterogeneous integration
hybrid integration
integrated lasers
integrated sensing
integrated sensors
interferometers
microresonators
optical integration
optoelectronic integration
photodetectors
planar photonic system
planar photonics
sensing
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5.2
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9.8K
被引数:
2.2W
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