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Rapid Electrohydrodynamic Lithography Using Low-Viscosity Polymers
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DOI：10.1002/smll.201000060.png)
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摘要
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This study explores a number of low-viscosity glass-forming polymers for their suitability as high-speed materials in electrohydrodynamic (END) lithography. The use of low-viscosity polymer films significantly reduces the pattering time (to below 10 s) compared to earlier approaches, without compromising the high fidelity of the replicated structures. The rapid pace of this process requires a method to monitor the completion of END pattern formation. To this end, the leakage current across the device is monitored and the sigmoidal shape of the current curve is correlated with the various stages of EHD pattern formation.
Keyword:
capacitors
electrohydrodynamic lithography
pattern formation
polymers
viscosity
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IF:
12.1
论文数:
3.0W
被引数:
16.4W
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