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Self-calibration interferometric stitching test method for cylindrical surfaces
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DOI：10.1364/OE.473836.png)
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摘要
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The surface figure accuracy requirement of cylindrical surfaces widely used in rotors of gyroscope, spindles of ultra-precision machine tools and high-energy laser systems is nearly 0.1 mu m. Cylindricity measuring instrument that obtains 1-D profile result cannot be utilized for deterministic figuring methods. Interferometric stitching test for cylindrical surfaces utilizes a CGH of which the system error will accumulated to unacceptable extent for large aperture/angular aperture that require many subapertures. To this end, a self-calibration interferometric stitching method for cylindrical surfaces is proposed. The mathematical model of cylindrical surface figure and the completeness condition of self-calibration stitching test of cylindrical surfaces were analyzed theoretically. The effects of shear/stitching motion error and the subapertures lattice on the self-calibration test results were analyzed. Further, a self-calibration interferometric stitching algorithm that can theoretically recover all the necessary components of the system error for testing cylindrical surfaces was proposed. Simulations and experiments on a shaft were conducted to validate the feasibility.(c) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
Keyword:
WAVE-FRONT
INTERFEROGRAMS
METROLOGY
RECONSTRUCTION
MISALIGNMENT
期刊
IF:
3.3
论文数:
6.1W
被引数:
14.3W
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引用论文
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