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Single-shot areal profilometry using hyperspectral interferometry with a microlens array
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DOI：10.1364/OE.25.008801.png)
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We describe a single-shot technique to measure areal profiles on optically smooth and stepped surfaces for applications where rapid data acquisition in non-cooperative environments is essential. It is based on hyperspectral interferometry (HSI), a technique in which the output of a white-light interferometer provides the input to a hyperspectral imaging system. Previous HSI implementations suffered from inefficient utilisation of the available pixels which limited the number of measured coordinates and/or unambiguous depth range. In the current paper a > 20-fold increase in pixel utilisation is achieved through the use of a 2-D microlens array, that leads to a 35 x 35 channel system with an unambiguous depth range of 0.88 mm. (C) 2017 Optical Society of America
Keyword:
ROUGH SURFACES
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IF:
3.3
论文数:
6.1W
被引数:
14.3W
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