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Snapshot multi-wavelength interference microscope

delete2018-07-02
delete38
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OA
AI
X
Xiaobo Tian
X
Xingzhou Tu
J
Junchao Zhang
O
Oliver Spires
N
Neal Brock
S
Stanley Pau
R
Rongguang Liang *
DOI:10.1364/OE.26.018279delete
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摘要

摘要

En 中文
A snapshot multi-wavelength interference microscope is proposed for high-speed measurement of large vertical range discontinuous microstructures and surface roughness. A polarization CMOS camera with a linear micro-polarizer array and Bayer filter accomplishes snapshot multi-wavelength phase-shifting measurement. Four interferograms with pi/2 phase shift are captured at each wavelength for phase measurement, the 2 pi ambiguities are removed by using two or three wavelengths. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
Keyword:
PHASE-SHIFTING INTERFEROMETRY
SCANNING INTERFEROMETRY
PROFILE MEASUREMENT
DIGITAL HOLOGRAPHY
WAVELET TRANSFORM
CAMERA
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期刊

Optics Express 封面图
Optics Express
IF:
3.3
论文数:
6.1W
被引数:
14.3W

机构

S
shenyang institute of automation, cas
学者数:
400
论文数: 367
被引数: 1
U
University of Arizona
学者数:
3.6W
论文数: 3.2W
被引数: 980
C
chinese academy of sciences
学者数:
56.7W
论文数: 45.0W
被引数: 704
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