.png){kind=icon}
.png){kind=icon}
Return
Solid-state dewetting of thin Au films studied with real-time, in situ spectroscopic ellipsometry
.png){kind=icon}
PRE
AI
M
F
M
DOI：10.1016/j.apsusc.2016.09.115.png)
.png){kind=icon}
Original request for help.png){kind=icon}
Share.png){kind=icon}
Save
Abstract
En 中文
We report the design and testing of a small, high vacuum chamber that allows real-time, in situ spectroscopic ellipsometry (SE) measurements; the chamber was designed to be easily inserted within the arms of a commercial ellipsometer. As a test application, we investigated the temperature-induced solid-state dewetting of thin (20 to 8 nm) Au layers on Si wafers. In situ SE measurements acquired in real time during the heating of the samples reveal features that can be related to the birth of a localized surface plasmon resonance (LSPR), and demonstrate the presence of a temperature threshold for the solid-state dewetting. (C) 2016 Elsevier B.V. All rights reserved.
Keywords:
Ellipsometry
Solid-state dewetting
Thin Au films
Plasmonicsa
AI Summary
Key information extracted from the uploaded paper, including a brief overview, abstract, background, key highlights, visual analysis, and future outlook.
Journal
IF:
6.9
Papers:
6.1W
Citations:
19.4W
Organization
Cited Papers