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Spatial Airflow Impact Source Positioning System Based on MEMS Pressure Sensor Arrayed on Flexible Substrate
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DOI：10.1109/JSEN.2023.3291377.png)
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摘要
En 中文
Spatial airflow impact source localization is vital for security detection, which lack of effective positioning technology. Herein, this article presents a spatial airflow impact source positioning system based on microelectromechanical system (MEMS) pressure sensor array. A piezoresistive pressure sensor with a sensitivity of 28 mV/MPa is fabricated by the MEMS technology. To position the airflow impact source accurately, we array the MEMS pressure sensors on a flexible and wearable substrate. Four arrayed sensors are essential for positioning a spatial airflow impact source, and the experimental results demonstrate the feasibility of the scheme with coordinates errors (X: 1.93 mm, Y: 2.29 mm, and Z: 3.30 mm). Also, we develop a 3 x 3 type pressure sensors array structure to enhance the positioning accuracy, which improves the triaxial coordinates localization accuracy 96.9%, 87.8%, and 74.9%, respectively. This work provides a reliable method for spatial airflow impact source accurately positioning with a potential application of wearable devices.
Keyword:
Sensors
Sensor arrays
Pressure sensors
Robot sensing systems
Micromechanical devices
Substrates
Piezoresistive devices
Airflow impact source
flexible substrate
microelectromechanical system (MEMS) pressure sensors array
spatial positioning
期刊
IF:
4.5
论文数:
2.2W
被引数:
7.3W
机构
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