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State-to-state kinetics and coupled electron-Boltzmann modeling of pulsed RF molecular plasmas
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DOI：10.1088/1361-6463/ae6280.png)
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Abstract
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Understanding and controlling molecular radio-frequency (RF) plasma characteristics is essential for low-temperature plasma applications, including air-breathing propulsion, plasma-assisted energy systems, and materials processing. Pulsed operation is often preferred for enhanced control but involves inherently transient, multi-scale processes that require robust and coupled modeling approaches. This study develops a closely coupled unsteady electron-Boltzmann and plasma-kinetics framework to investigate the strongly non-equilibrium behavior of pulsed RF molecular plasmas. The framework consistently couples electron, vibrational, and chemical processes, incorporating additional electron loss mechanisms from flow and wall interactions. A detailed state-to-state model for hydrogen ( ), resolving 15 vibrational levels, is implemented to construct a comprehensive plasma kinetics database. Results highlight the limitations of conventional steady-state solvers in capturing transient phenomena. Analysis of the electron energy distribution function under pulsed operation revealed strong non-Maxwellian features during both the pulse-on and pulse-off phases. Furthermore, phase-resolved power absorption demonstrated electron momentum-induced negative power absorption within the RF cycle, indicating complex heating dynamics. The vibrational distribution exhibited a highly non-Maxwellian profile that, while appearing two-temperature-like, does not conform to a simple two-temperature model due to the gradual population transition between the two energy regions and the stronger depletion of the . Quantification of electron power losses indicated that in steady pulsed operation, ionization from vibrationally excited ( ) and atomic contributed as significantly to electron production as non-dissociative ionization from ground-state . Additionally, the power gain from super-elastic collisions was significant during the afterglow phase.
Keywords:
pulsed RF plasma
electron-Boltzmann equation
state-to-state kinetics
non-equilibrium plasma
vibrational distribution
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