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Stereo deflectometry based automatic segmentation technique for measuring structured specular surfaces
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DOI：10.1016/j.optlaseng.2022.107195.png)
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摘要
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Techniques have been studied to extend the measurement capability of stereo deflectometry from continuous specular surfaces only to complex structured specular surfaces. Segmentation is a key process in these tech-niques, which separates a measured structured surface into several continues segments with gradient and co-ordinate data to achieve high form measurement accuracy. However, it is a great challenge to achieve auto-matic, fast, and accurate segmentation since specular surfaces have no RGB (red, greed, and blue) texture to be used in the segmentation process. In this paper, we present an automatic segmentation technique based on the characteristics of gradient variation and 3D coordinate data of the measured structured specular surfaces. Different segmentation strategies are applied and discussed for the measured discontinuous specular surfaces and continuous non-differentiable specular surfaces. Compared with the existing segmentation methods in terms of stereo deflectometry, the proposed technique shows significantly advantages in automation, speed, and flexibil-ity. Experimental results verified the effectiveness and accuracy of the proposed method in the measurement of structured specular surfaces.
Keyword:
Optical metrology
Three-dimensional measurement
Deflectometry
Structured specular surfaces
Data fusion
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