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Stitching interferometry using alternating calibration of positioning and systematic errors
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DOI：10.1364/OE.521791.png)
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Stitching interferometry is an essential technique for the non-contact, high-precision measurement of large apertures or complex optical surfaces. However, the accuracy of fullaperture surface reconstruction is significantly compromised by subaperture positioning and systematic errors. To address this challenge, this study introduces a novel stitching interferometry method utilizing alternating calibration of positioning and systematic errors (SIAC). This method calibrates one type of error while maintaining the other constant, and alternates between these processes to effectively decouple the two errors, facilitating accurate phase stitching. Within this calibration framework, an iterative weighted phase stitching model employing vertical projection for estimating overlapping areas was developed to calibrate positioning errors. Additionally, the rotation measurements of a single subaperture, in conjunction with a global fitting approach, were employed to correct reference errors. Numerical simulations have confirmed the efficacy of SIAC in calibrating these errors. Moreover, experimental measurements were performed on both a plane mirror and gullwing aspheres, with the resulting stitched full-aperture phase distributions and cross-testing outcomes affirming the method's accuracy and practicality. This research provides a novel solution for stitching interferometry, enhancing the precision of optical surface measurements.
Keyword:
SELF-CALIBRATION
METROLOGY
APERTURE
期刊
IF:
3.3
论文数:
6.1W
被引数:
14.3W
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