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Stroboscopic supercontinuum white-light interferometer for MEMS characterization
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DOI：10.1364/OL.37.001703.png)
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We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400 x 25 x 4 mu m(3) microbridge driven with 0-6.8 V sinusoidal voltage at 10 Hz was 1.42 +/- 0.03 mu m (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices. (C) 2012 Optical Society of America
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