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Structured Illumination Chip Based on Integrated Optics
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DOI：10.1088/0256-307X/33/5/054204.png)
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A compact structured illumination chip based on integrated optics is proposed and fabricated on a silicon-on-insulator platform. Based on the simulation of Gaussian beam interference, we adopt a chirped diffraction grating to achieve a specific interference pattern. The experimental results match well with the simulations. The portability and flexibility of the structured illumination chip can be increased greatly through horizontal encapsulation. High levels of integration, compared with the conventional structured illumination approach, make this chip very compact, with a footprint of only around 1 mm(2). The chip has no optical lenses and can be easily combined with a microfluidic system. These properties would make the chip very suitable for portable 3D scanner and compact super-resolution microscopy applications.
Keyword:
SUPERRESOLUTION
MICROSCOPY
RESOLUTION
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4.2
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OAAI分享收藏分享收藏Multibeam interferometric illumination as the primary source of resolution in optical microscopy
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分享收藏分享收藏DMD-based LED-illumination Super-resolution and optical sectioning microscopy.png)
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