Subwavelength-size solid immersion lens

doi:10.1364/OL.36.003930

2011-09-30

DOI：10.1364/OL.36.003930

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摘要

En 中文

We report on the fabrication and characterization of nanoscale solid immersion lenses (nano-SILs) with sizes down to a subwavelength range. Submicrometer-scale cylinders fabricated by electron-beam lithography are thermally reflowed to form a spherical shape. Subsequent soft lithography leads to nano-SILs on transparent substrates for optical characterization. The optical characterization is performed using a high-resolution interference microscope with illumination at 642nm wavelength. The focal spots produced by the nano-SILs show both spot-size reduction and enhanced optical intensity, which are consistent with the immersion effect. (C) 2011 Optical Society of America

Keyword:

RESOLUTION INTERFERENCE MICROSCOPY

FIELD

LITHOGRAPHY

SCALE

期刊

Optics Letters

IF:

3.3

论文数:

4.0W

被引数:

7.6W

机构

Ecole Polytechnique Federale de Lausanne

学者数:

1.7W

论文数: 1.3W

被引数: 25

swiss federal institutes of technology domain

学者数:

9.0W

论文数: 8.0W

被引数: 163

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