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Synchronous multi-wavelength interferometric method for measuring aspherical surface profile
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DOI：10.1364/OE.546569.png)
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To our knowledge, a novel synchronous multi-wavelength interferometric technique is introduced. The aspherical surface profile is measured by focusing a multi-wavelength beam at various positions along the optical axis using a dispersive lens, thereby generating a series of spherical waves with varying curvatures. A comprehensive analysis of the operational mechanism of dispersive lenses in aspherical surface metrology is conducted, culminating in the design principles for their axial focal points. This approach significantly enhances measurement efficiency and accuracy while minimizing mechanical movement errors compared to the conventional annular sub-aperture method. Moreover, the integration of dispersive lenses streamlines system design, reduces the complexity of system modeling, and facilitates the development of a more precise digital twin model for subsequent error correction. (c) 2025 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
Keyword:
SUBAPERTURE STITCHING INTERFEROMETRY
RETRACE ERROR-CORRECTION
LENS
期刊
IF:
3.3
论文数:
6.1W
被引数:
14.3W
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引用论文
Vertex radius of curvature error measurement of aspheric surface based on slope asphericity in partial compensation interferometry.png)
OPTICS EXPRESS
OAAI
OPTICS EXPRESSIF3.3
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