Techniques for generating 3-D EBSD microstructures by FIB tomography

Weitao Xu

doi:10.1016/j.matchar.2006.10.001

2007-10-01

PRE

DOI：10.1016/j.matchar.2006.10.001

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摘要

En 中文

This work describes some techniques developed for focused ion beam (FIB) serial sectioning and electron backscatter diffraction (EBSD) mapping of partially and fully recrystallized metals. A DualBeam (TM) platform was used to sequentially mill submicron slices of a material by FIB with the crystallographic features of each newly created surface characterized by EBSD. Two promising milling procedures are described which involve: (i) the generation of a small (similar to 10-50 mu m) diameter whisker for subsequent serial sectioning perpendicular to its long axis, and (ii) more extensive FIB milling of a larger sample to generate a protruding rectangular-shaped volume at the free surface. The latter was found to be the more powerful method of serial sectioning as the initial preparation is slightly less tedious. Using both techniques, serial sectioning was carried out on both recrystallized iron and partly recrystallized nickel samples. The serial sectioning technique revealed a number of features of the recrystallizing grains in nickel that are not clearly evident in 2-D EBSD micrographs. (c) 2006 Elsevier Inc. All rights reserved.

Keyword:

EBSD

FIB tomography

focused ion beam (FIB)

recrystallization

serial sectioning