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Torsion based universal MEMS logic device
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DOI：10.1016/j.sna.2015.10.039.png)
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摘要
En 中文
In this work we demonstrate torsion based complementary MEMS logic device, which is capable, of performing INVERTER, AND, NAND, NOR, and OR gates using one physical structure within an operating range of 0-10 V. It can also perform XOR and XNOR with one access inverter using the same structure with different electrical interconnects. The paper presents modeling, fabrication and experimental calculations of various performance features of the device including lifetime, power consumption and resonance frequency. The fabricated device is 535 mu m by 150 mu m with a gap of 1.92 mu m and a resonant frequency of 6.51 kHz. The device is capable of performing the switching operation with a frequency of 1 kHz. (C) 2015 Elsevier B.V. All rights reserved.
Keyword:
Logic device
Micromirror
Polyimide
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IF:
4.9
论文数:
1.5W
被引数:
3.3W
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