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Tunable liquid-filled microlens array integrated with microfluidic network
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DOI：10.1364/OE.11.002370.png)
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摘要
En 中文
An elastomer-based tunable liquid-filled microlens array integrated on top of a microfluidic network is fabricated using soft lithographic techniques. The simultaneous control of the focal length of all the microlenses composing the elastomeric array is accomplished by pneumatically regulating the pressure of the microfluidic network. A focal length tuning range of hundreds of microns to several millimeters is achieved. Such an array can be used potentially in dynamic imaging systems and adaptive optics. (C) 2003 Optical Society of America.
Keyword:
FABRICATION
ELEMENTS
