Two-quadrant area structure function analysis for optical surface characterization

doi:10.1364/OE.20.023275

Two-quadrant area structure function analysis for optical surface characterization

2012-09-25

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DOI：10.1364/OE.20.023275

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This paper describes the use of the area structure function (SF) for the specification and characterization of optical surfaces. A two-quadrant area SF is introduced because the one-quadrant area SF does not completely describe surfaces with certain asymmetries. Area SF calculations of simulation data and of a diamond turned surface are shown and compared to area power spectral density (PSD) and area autocorrelation function (ACF) representations. The direct relationship between SF, PSD, and ACF for a stationary surface does not apply to non-stationary surfaces typical of optics with figure errors. (c) 2012 Optical Society of America

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Two-quadrant area structure function analysis for optical surface characterization

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