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Ultrafast laser direct-write actuable microstructures
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DOI：10.1063/1.2972116.png)
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Actuable microelectromechanical systems (MEMS), fabricated by direct writing of deformable membranes on indium tin oxide/copper phthalocyanine (CuPc)/Al microstructures using 130 fs laser pulses, are described. The pulses locally ablate the CuPc without requiring micromachined release holes, demonstrating a novel material release mechanism. The direct-write procedure therefore requires fewer processing steps than traditional MEMS approaches. Using it, we fabricated optical modulators with phase modulation depths >pi, intensity modulation amplitudes >50%, and bandwidths >100 kHz, at 5-10 V drive voltage. Fabrication of numerous microstructures and nanostructures can be envisioned, including photonic crystals and optical phased-array gratings.
Keyword:
high-speed optical techniques
laser materials processing
micromechanical devices
optical modulation
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3.6
论文数:
10.4W
被引数:
17.8W
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