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Ultrasensitive optomechanical strain sensor
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DOI：10.1364/OE.515343.png)
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We demonstrate an ultrasensitive optomechanical strain sensor based on a SiN membrane and a Fabry-Perot cavity, enabling the measurements of both static and dynamic strain by monitoring reflected light fluctuations using a single -frequency laser. The SiN membrane offers high -quality -factor mechanical resonances that are sensitive to minute strain fluctuations. The two -beam Fabry-Perot cavity is constructed to interrogate the motion state of the SiN membrane. A static strain resolution of 4.00 n epsilon is achieved by measuring mechanical resonance frequency shifts of the SiN membrane. The best dynamic resolution is 4.47 p epsilon Hz - 1 / 2 , which is close to that of the sensor using high -finesse cavity and optical frequency comb, overcoming the dependence of ultrasensitive strain sensors on narrow-linewidth laser and high -finesse cavity with frequency locking equipment. This work opens up a promising avenue for a new generation of ultrasensitive strain sensors.
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IF:
3.3
论文数:
6.1W
被引数:
14.3W
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