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Vacuum seal for a rectangular flange
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DOI：10.1016/j.vacuum.2011.01.009.png)
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摘要
En 中文
A new vacuum seal for a rectangular flange used in r.f. equipments, was developed. The vacuum seal consists of a recess with a flat surface, machined into a rectangular flange, a rectangular metal gasket with a raised projection on one face, and a mating flange with a recess and raised projection. No leak greater than 1 x 10(-10) Pa m(3)/s was found in leak tests, before and after baking cycles (100 degrees C, 12 h). (C) 2011 Elsevier Ltd. All rights reserved.
Keyword:
Vacuum seal
Vacuum flange
Metal gasket
Ultrahigh vacuum
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